Integration of physics, mechatronics, cleanliness and precision

settels savenije research & development

From the start of a project, we deploy all in-house knowledge from concept and system design, parts manufacturing and assembly & test in dedicated teams. We start from a solid system architecture and design and verify and validate every step along the way, including complex physics modelling, prototyping and proof of concept demonstration. This has allowed us to build a track record of executing complex and challenging innovation projects in a predictable way.

Our services

Feasibility and concept studies
Design and engineering of modules and systems up to and including full TPD
Test and validation
In-house proof-of-concept prototype and first series realisation
Product lifecycle services
IP management for customers

our expertise

Our expertise lies in integration in the domain of nanometer-precision mechanics, optics and mechatronics systems, operating in challenging physical ambients.
Ambients like ambients with extreme temperature changes, gas- and heat flows, and ultra-high and ultra clean vacuum requirements

our competences

(Precision) mechanics; Mechatronics
Software & Control, Electronics
Optics, Opto-Mechanics and Opto-Mechatronics
Physics (vacuum, heat, pressure, radiation, ...); Ultra Clean, Ultra High vacuum systems design
Design for cleanliness (particle, chemical); DfX (assembly, manufacturing, cost)

our handshake with clients

For customers we virtually become part of their R&D environment, understanding the true physics complexity of processes, systems and products.
Our focus on reviewing of work in all stages of our projects, is to foresee challenges and risks together with our customers, and manage them before they become problematic.

project examples

feasibility study

In a multi-year research program we supported R&D of our customer.
Our team of 6 FTE on average was involved in thermal modelling, gas flow analysis, concept design of printheads and stages in an ultra clean vacuum environment.
Proof of concept was verified and a new generation of research equipment was designed, built and integrated in the research laboratory of our customer, which was key for the market introduction of a new generation of products.

IP creation

The combination of hologram technology in an opto mechatronics module lead to a world wide approved patent of a high resolution measuring device.
Our team foscused on concept development, patent study, patent application, the industrialisation of the sensor and developing an assembly line for pilot production.

ultra-stable measurement

For verifying sensor-concept-accuracy our team developed a concept to reach extreme stability in measurement environment, enabling stability down to picometer levels over long periods of time (10^-12 sensitivity).
Handling large masses, vacuum cleanliness, isolating and damping of vibrations, predictable material and thermal (creep) behavior were all taken into account.

positioning optical components

In semicon production equipment, optical elements are getting larger.
Positioning optical elements with accuracy and stability becomes more important.
Our team developed concepts for stable positioning and minimal deformation, operating in an ultra-clean vacuum environment.
The optical elements weighed up to several 100’s kgs.
We developed, built and installed the holders including the related tooling and automation equipment.